S5000-30 Floor-standing Sorter (up to 300 mm)

The S5030 Sorter is a recipe-driven wafer sorting system which is capable to sort wafers up to 300mm. The system features a fixed thickness gauge as well as state-of-the-art Optical Character Recognition (OCR), enabling it to sort wafers either based on thickness or OCR. Its Uninterrupted Power Supply (UPS) ensures safe wafer transfer and data backup in the event of a power failure. It can also process wafers based on process data generated by third-party machines.